Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_758994071efb42b565fc2c04637be131 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10N40-22 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M145-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M173-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M105-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M107-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M133-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C10M133-56 |
filingDate |
2001-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10ffe9092c58a4420d6875e0746ea3af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0ceb537b3eaf32edf93e5f28210c405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c4c414b5852da5f874c89d34c0c3069 |
publicationDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2002338987-A |
titleOfInvention |
Water-soluble grinding and polishing fluid for metal and / or hard and brittle materials |
abstract |
(57) [Summary] (with correction) [PROBLEMS] To provide a water-soluble grinding and polishing liquid for metal and / or hard and brittle material with improved processing speed. SOLUTION: A water-soluble grinding / polishing liquid containing a polyoxyalkylene glycol of the general formula 1 and an amide of an aliphatic carboxylic acid having 8 to 36 carbon atoms is used. Z-[{(CH 2 CH 2 O) a- (AO) b } R] p (1) (R is a C 1-18 alkyl group or alkenyl group, An acyl group or a hydrogen atom of 2 to 24 , Z is a residue of a C1-6 p-valent alcohol, A is an alkylene group having 3 to 4 carbon atoms, and a and b are each an integer having an average of 10 to 100; Or 1 A / b is 30/70 to 70/30; p is an integer of 1 to 6. ) |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009133612-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109023390-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010202458-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016132769-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106141838-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106141838-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016068181-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4474495-B2 |
priorityDate |
2001-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |