| abstract |
(57) [Summary] (Revised) [Solution] One or more kinds of repeating units represented by the following general formulas (1) and (2) and a unit capable of decomposing under an acidic condition to generate a carboxylic acid are provided. A polymer compound having a weight-average molecular weight of 1,000 to 500,000, characterized by containing. (Wherein, W represents a divalent group having 2 to 15 carbon atoms, and a 5-membered or 6-membered cyclic ether together with the carbon atoms to be bonded; Form any of a cyclic ketone, lactone, cyclic carbonate, cyclic anhydride or cyclic imide. Y represents —O— or — (NR 1 ) —, and R 1 represents a hydrogen atom or a carbon atom And 15 to 15 linear, branched or cyclic alkyl groups. k is 0 or 1. [Effect] Sensitive to high energy rays and excellent in sensitivity, resolution and etching resistance, it is useful for fine processing with electron beams or far ultraviolet rays. |