| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D85-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65G49-07 |
| filingDate |
2001-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_045474ea3ab816a7fdb9cac44389c3c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca191d566346e3d74c6a775aea9ef25c |
| publicationDate |
2002-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002329778-A |
| titleOfInvention |
Substrate transfer method and substrate storage container |
| abstract |
(57) [Problem] To provide a method of transporting a substrate, which makes it possible to accurately inspect the contamination state of the substrate. SOLUTION: This is a method of transporting a substrate to which a substrate to which contaminants are attached is transported to an inspection facility, wherein the substrate is transported in a state where one substrate is stored in one closed space. |
| priorityDate |
2001-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |