http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002322597-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06 |
| filingDate | 2001-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_164994ac254500a64f4b7d5916beea5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce26a99b2fa810587d73d4b18b4d7b0b |
| publicationDate | 2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002322597-A |
| titleOfInvention | Liquid processing equipment |
| abstract | (57) [Problem] To provide a liquid processing apparatus capable of reducing non-uniformity of liquid processing due to bubbles. SOLUTION: In the liquid processing apparatus, a hydrophilic region is formed in at least a part of a portion of a substrate holding portion that holds a substrate, in contact with the processing liquid. The generation of bubbles when the substrate holding unit comes into contact with liquid is reduced, and the bubbles generated on the substrate can be quickly removed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010116862-A |
| priorityDate | 2001-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.