http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002308986-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f548ca15b9b5748f1afd80e3d1636ec |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2001-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d51a188e09c7dbd97b036fec179cb9b3 |
| publicationDate | 2002-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002308986-A |
| titleOfInvention | Photosensitive resin composition and method for producing the same |
| abstract | PROBLEM TO BE SOLVED: To provide a polyimide precursor having an ethylenically unsaturated double bond in a side chain capable of reacting to actinic rays such as ultraviolet rays, and having a negative pattern forming ability which can be developed with an alkaline aqueous solution. And a photosensitive resin composition having the same. (A) A polyimide precursor composed of a repeating unit represented by the following formula: (Wherein, R 3 and R 4 represent an organic group having an ethylenically unsaturated bond) (B) a photopolymerization initiator, a sensitizer, an inhibitor for storage stability, and (C) It consists of a solvent containing a photosensitive agent, and (A) the repeating unit portion of (A) (2) and (3) in the polyimide precursor is 0.15. It is a negative photosensitive resin composition characterized by being at least mol%. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006008991-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1980984-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563557-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006008991-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100882620-B1 |
| priorityDate | 2001-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 282.