http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002303637-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_27c1d9d5b2f962cf3d0335d5de4a97ca |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2001-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_220c0d45d9a2a3166349e42c4b718012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa545ae13c4020da9ce5c928a843651d |
| publicationDate | 2002-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002303637-A |
| titleOfInvention | Probe pin and contactor having the same |
| abstract | [PROBLEMS] To provide a probe pin made of a needle-like single crystal that can contact an electrode made of Al or solder having a surface oxide film, and a probe card having the same. Kind Code: A1 A semiconductor measuring vertical probe pin 1 made of a needle-shaped single crystal and having a conductive film provided on the surface thereof, the probe pin being in contact with an electrode 3 of a device under test is viewed in a longitudinal direction. When the radius of the edge of No. 2 is 0.7 μm or less and the probe pin is in contact with the electrode 3 of the test object in a buckled state, the load applied in the direction perpendicular to the surface of the electrode is applied to the probe pin. Is 0.03 to 0.30 mN / μm 2 when the tip of the probe pin is in contact with the electrode, and the tip surface of the probe pin is 87 mm away from the center line in the longitudinal direction of the probe pin. Probe pin 1 using needle-like single crystal characterized by having an inclination angle of less than or equal to degree And a probe card having the probe pins. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078921-B2 |
| priorityDate | 2001-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.