| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b159307681fe01f7ee6b3c5293474175 |
| publicationDate |
2002-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002296804-A |
| titleOfInvention |
Resist stripping solution and resist stripping method using the same |
| abstract |
(57) [Summary] [PROBLEMS] To obtain a resist stripping solution excellent in safety. SOLUTION: A resist stripping solution containing t-butylhydrazine or a salt thereof is prepared and used for stripping the resist. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7553754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7154180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7928575-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7098539-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004214606-A |
| priorityDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |