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filingDate 2001-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb4922c39c7b169ac9497aeb09725065
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publicationDate 2002-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002290013-A
titleOfInvention Metal circuit pattern forming method
abstract PROBLEM TO BE SOLVED: To provide a metal circuit pattern forming method which has high adhesion strength between a polyimide base material and a metal circuit portion and high insulation resistance between lines of a metal circuit. SOLUTION: A polyimide resin precursor layer 2 is formed on a polyimide substrate 1, a photosensitive resin 3 is applied on the polyimide resin precursor layer 2, and the photosensitive resin 3 is exposed and developed to form a non-metal circuit. Forming the resin pattern mask 4 exposing the polyimide resin precursor layer 2 of the portion 6 and forming the non-metal circuit forming portion 6 The polyimide resin precursor layer 2 is removed, the resin pattern mask 4 is peeled off, and then ultraviolet rays 8 are irradiated in the presence of a hydrogen donor 7 to form a plating base nucleus. Forming a base metal layer for forming the layer 9, and forming a metal circuit portion 5 on the plating base metal layer 9. And a metal circuit forming step consisting of an imidization treatment in which the polyimide resin precursor layer 2 is heated and imidized to form a polyimide resin layer.
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