http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002278075-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L67-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-36 |
| filingDate | 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2826f096e546745ccc5f3cec94d2df55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9abb3e752a68859bb0d03422bb05c42d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38fc54bffba935dae3235f69f759b1d2 |
| publicationDate | 2002-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002278075-A |
| titleOfInvention | Biaxially oriented polyester film for photoresist |
| abstract | [PROBLEMS] To provide a polyester film which exhibits excellent substrate followability to a substrate having an uneven shape and is used as a support layer of a photoresist film having excellent resolution. SOLUTION: This is an aggregate of primary particles having ethylene terephthalate as a main repeating unit, having a melting point of 210 to 250 ° C, and an average particle size of 0.001 to 0.1 µm, and having an average secondary particle size of 0.3. ~ 3 μm, pore volume 0.5 ~ 2.0 ml / g of porous silica particles of 0.02 One side of a copolymerized polyester layer (A) composed of a copolymerized polyester containing 0.8% by weight contains ethylene terephthalate as a main repeating unit and has a melting point of 210 to 250. C., a polyester film obtained by laminating a copolymerized polyester layer (B) made of a copolymerized polyester having an inert particle content of 0.02% by weight or less, A biaxially oriented polyester film for a photoresist, wherein the film has a plane orientation coefficient of 0.08 to 0.16. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012097164-A |
| priorityDate | 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.