| abstract |
(57) [Summary]nPROBLEM TO BE SOLVED: To develop with an alkaline aqueous solution and to be sharp Including a polyimide precursor with excellent negative pattern forming ability A photosensitive resin composition.n(A) Polyimide having the following repeating unit Precursor,n (However, in the formula, R 1 , R Two Is an organic group containing an aromatic ring, R Three , R Four Is an organic group containing an aromatic ring, R Five , R 6 Is An organic group having an ethylenically unsaturated bond, R 7 , R 8 Is With two or more hydroxyl or carboxyl groups (B) Dehydration condensation for producing the above polyimide precursor Agent, (C) actinic light-sensitive agent and (D) solvent Resin composition and method for producing the same Is the law. |