| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e10beb77ebcd5bcee440f78652d49ec3 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04B1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D46-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04F13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2001-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5315e1f26b9b908a6642bf26f3580e51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5b91b7d5d920fe232bf7f58f84478db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b4fd3ec667c4bb2a3dc8bb9899137f |
| publicationDate |
2002-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002248313-A |
| titleOfInvention |
Local equipment |
| abstract |
(57) [Problem] To provide local equipment such as a semiconductor manufacturing apparatus in which a phosphorus compound or a boron compound does not exist. At least a surface material of a wall constituting a local facility and a filter material of an air filter and a seal material for sealing between a filter material and a frame are formed of a material that does not release an organic phosphorus compound and a boron compound into the air. I do. |
| priorityDate |
1995-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |