http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002246385-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G35-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51b9842b268518ce4b1f4132273b83e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf26abb846c60f73e283c4cd27e3920 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7474d362bdb0ee366c12f7997b2a65d3 |
| publicationDate | 2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002246385-A |
| titleOfInvention | Production of tantalum-containing products and tantalum oxide films |
| abstract | (57) [Problem] To provide a material and a method for easily and efficiently forming a high-quality tantalum oxide film. A tantalum-containing product which is a reaction product of a tantalum alkoxide with at least one hydroxy compound selected from the group consisting of alcohols and phenols, and a composition for forming a tantalum oxide film containing the same. A method of forming a tantalum oxide film by applying the composition on a substrate and then heat-treating the composition. A tantalum oxide film formed by this method and an insulating film for a semiconductor device having the tantalum oxide film. |
| priorityDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 109.