http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002246152-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 |
| publicationDate | 2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002246152-A |
| titleOfInvention | Ceramic heater |
| abstract | [PROBLEMS] A ceramic which eliminates a temperature distribution generated on a heating surface of a ceramic substrate and can heat an object to be heated such as a semiconductor wafer accurately and uniformly at a set temperature. Provide a heater. A ceramic heater having a heating element formed on a surface or inside of a ceramic substrate and a temperature measuring element provided on the ceramic substrate, wherein the temperature measuring element is located in a resistance heating element forming region. A ceramic heater, wherein at least one is provided in each of the resistance heating element non-forming regions. |
| priorityDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.