http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002239376-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d3fffc3def97a7d560c620f7474d7af http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-46 |
| filingDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f91ae29c5be337a24f1d756ab37a20c6 |
| publicationDate | 2002-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002239376-A |
| titleOfInvention | Surface modification apparatus and surface modification method |
| abstract | (57) [Problem] To realize a composite barrier discharge under high atmospheric pressure, in which dielectric breakdown is difficult even when a ferroelectric material such as titanium oxide and barium titanate is used, and the generated plasma has a high energy density. In addition, the present invention provides a surface treatment apparatus and a surface treatment method for realizing highly efficient surface modification of a substrate. SOLUTION: A plate-shaped first electrode 22 and a second electrode 23 opposed to each other, and the first and second electrodes 22, 2 are opposed to each other. 3 and a potential difference applying means 25 for applying a potential difference between the first and second electrodes 22 and 23, and a potential difference applying means 25 for applying a potential difference between the first and second electrodes 22 and 23. In a device for modifying the surface of a workpiece held between the first and second electrodes by applying a high voltage under atmospheric pressure to generate a barrier discharge, the dielectric member 24A A first base material made of a dielectric, and a second base material having a relatively small mechanical strength but a relatively large dielectric constant than the dielectric, and having an average dielectric constant in the plane direction. 30 or more. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111398688-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111398688-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014116417-A |
| priorityDate | 2001-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.