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publicationDate 2002-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002237626-A
titleOfInvention Transfer method of membrane
abstract (57) [Problem] To provide a device capable of transferring a film even on a substrate on which direct film formation is difficult even in a process requiring a high temperature. SOLUTION: In a film transfer method of transferring films to be transferred 14 to 15 formed on first substrates 11 and 12 onto second substrates 18 and 17, a lift-off layer 13 and a weak acid are formed on the first substrate. A first step of providing a transferable film that is hardly soluble or insoluble, a second step of bonding the transfer target film to the second substrate, and etching of the lift-off layer using a weak acid to peel off the first substrate to form a coating. Transferring the transfer film onto the second substrate.
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