| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_086f7e73d7b41664750b79736f86b0d2 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K101-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-352
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate |
2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c8ce908bf1107274c74feaf97bab6e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf5597d397995f50b2d8a8fe691cdf78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_341369884be084183c109c7c09d473cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2f2d83b13c054b06cada839dc2e1449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7732ea9e0e2ff511990ce4eb7af9e759 |
| publicationDate |
2002-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002231655-A |
| titleOfInvention |
Laser annealing equipment |
| abstract |
(57) [Problem] To provide a laser annealing apparatus capable of producing a semiconductor film having good characteristics. A laser optical system having a laser oscillator that outputs a laser beam instead of a conventional laser annealing apparatus that can activate or crystallize a semiconductor film of the substrate by irradiating the laser beam, and supports the substrate. A substrate supporting structure is provided so that the intersection angle between the optical axis of the laser beam on the irradiation surface of the substrate and the axis orthogonal to the irradiation surface of the substrate has a predetermined value δ. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003133254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014120672-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007103961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003224070-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6977191-B1 |
| priorityDate |
2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |