http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002220669-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f17085e38b2b4992be0c9e1edf4a516 |
| publicationDate | 2002-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002220669-A |
| titleOfInvention | Liquid material vaporization container |
| abstract | (57) [Summary] (Revised) [Solving Means] In a vaporization container for a liquid material for vapor phase growth in which a container main body is installed in a thermostat, a carrier gas introduction pipe 11 is provided at an outer peripheral portion of the container main body. A spiral tube 12 spirally arranged from an upper portion to a lower portion, and a dip tube arranged vertically in the container body and having a lower end located at a lower portion in the container body and immersed in the liquid raw material. 13 and a connection tube 14 for connecting the lower end of the spiral tube and the upper end of the dip tube. The carrier gas is heated when the carrier gas passes through the spiral tube, and the dip tube is moved from top to bottom. It was configured to flow and be introduced into the liquid material from the lower end opening. [Effect] By vaporizing and accompanying a liquid material such as trimethylgallium with a carrier gas, a gas can be supplied at a stable concentration without a change in the amount of vaporization. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8012876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101464356-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833353-B2 |
| priorityDate | 2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.