http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002220584-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2001-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c68eb141740ca93dd43c6d8013ea450 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62f906d96795ed26b0994cb015baed53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cd9782e312cfffde31dc37eb1ef84eb |
| publicationDate | 2002-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002220584-A |
| titleOfInvention | Precision abrasive |
| abstract | (57) [Problem] To provide a precision polishing material capable of obtaining a high polishing rate. A precision abrasive containing an aluminosilicate powder. The content of Si and Al in the aluminosilicate powder is 50% by mass or more in terms of SiO 2 and Al 2 O 3 , and the molar ratio of Si to Al is 0.01 <Si / Al <10. The precision abrasive as described above, which is 0. The precision abrasive according to any one of the above, wherein the content of the aluminosilicate powder is 50 to 100% by mass. BET specific surface area is 3 to 150 m 2 / g, cumulative 10%, cumulative 50%, cumulative 90% from the fine particle side of the cumulative particle size distribution measured by the laser diffraction scattering method. Are D10, D50 and D90, respectively. (D90-D10) / A precision abrasive according to any one of the above, wherein D50 is 5 or less and D50 is 5 μm or less. The density of the particles of the aluminosilicate powder is 2.0 to 4.0 g. / Precision abrasive according to any one of the above, which is in the range of / cm 3 . A slurry for precision polishing using the precision abrasive according to any one of the above. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009532855-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007525815-A |
| priorityDate | 2001-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.