| abstract |
(57) [Summary] [Purpose] A spherical semiconductor device that can transmit a detection signal and supply start-up power by wireless transmission / reception, eliminates conductive wires, and enables accurate wafer temperature measurement by a contact method. A spherical semiconductor device 12 based on a spherical silicon crystal material has a coiled wireless antenna 18 formed on a spherical surface thereof, and operates by an induced electromotive force generated by the antenna 18. At one pole 110 of the axis of symmetry 100 of the device 12, a temperature detection circuit 14 is formed. This temperature detection circuit 14 fits into a hemispherical recess on the wafer surface, It is fixed with an adhesive layer. The detected temperature is the antenna 18 Is transmitted wirelessly. |