| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28a869d6fc950d50f6df03f549ca3afa |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-30 |
| filingDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ebef443623961ad28924db337bfbc18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e82740006ae04e935913a9d9205a9f3 |
| publicationDate |
2002-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002200557-A |
| titleOfInvention |
Workpiece retaining ring for polishing equipment |
| abstract |
(57) [Problem] To provide a workpiece holding ring for a polishing apparatus having excellent toughness and abrasion resistance using a polyarylene sulfide resin. SOLUTION: This is a workpiece holding ring for a polishing apparatus formed of a polyarylene sulfide resin, which has a fracture toughness value K 1C of 2.2 MPa ยท m 1/2 or more and a crystallinity of 18% or more. A workpiece holding ring for a polishing apparatus. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006502576-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008093810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010036288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010017786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8100743-B2 |
| priorityDate |
2000-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |