| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_663a7ecb039723283d48ed9827a97c69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b159307681fe01f7ee6b3c5293474175 |
| publicationDate |
2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002196510-A |
| titleOfInvention |
Stripper for resist |
| abstract |
(57) [Problem] To provide a novel positive resist stripping solution which can be safely produced without using hydroxylamine. SOLUTION: A resist stripping solution is prepared by mixing hydroxylamine sulfate, alkanolamines and water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018526495-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10696932-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005022268-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012252070-A |
| priorityDate |
2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |