| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c38d38e537a924288998414661dd926a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2000-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0334f7fd24106ad456d80986f78910a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbd57361b49981d87572c4f827f13e91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c663e80932e8dc856f792f395a023819 |
| publicationDate |
2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002185005-A |
| titleOfInvention |
Hybrid TFT array substrate and method of manufacturing the same |
| abstract |
(57) [Summary] [Problem] Hydrogenated amorphous silicon TF on the same substrate A hybrid TFT array substrate having T and polysilicon TFTs is provided. Further, the present invention provides a TFT array substrate with a built-in drive circuit for high image quality and a large screen. The catalyst is formed by catalytic chemical vapor deposition. A channel portion is formed from a hydrogenated amorphous silicon thin film that can be converted to polysilicon without dehydrogenation processing, and a hydrogenated amorphous silicon TFT and a polysilicon T are formed on the same substrate. A hybrid TFT array substrate having FT is manufactured. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005311335-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005093813-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013149953-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102102585-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003031498-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7833579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007025962-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017195397-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101058176-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140107529-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7476572-B2 |
| priorityDate |
2000-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |