| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00 |
| filingDate |
2000-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_721173629ce6182c4c44560635048f6f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_274c9d5dbbdff1d77d32aecec05081b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_654b46ddeca3126051c8d902c2b24a71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b3f8b9683ed4da71ed8ef28063b9ad8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d4747cc40d77194ff7c88cb72ee8a5c |
| publicationDate |
2002-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002184830-A |
| titleOfInvention |
Method and apparatus for detecting defects in insulating film |
| abstract |
[PROBLEMS] To provide a technique for specifying a position of a minute defect in an insulating film with high accuracy. An insulating film and a Pt electrode electrically connected to a silicon substrate are immersed in an Na2Au (SO3) 2 electrolyte, a pulse voltage is applied between the silicon substrate and the Pt electrode, and a 10 nm or less diameter is formed on the insulating film defect. Au particles are precipitated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111074352-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006098362-A |
| priorityDate |
2000-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |