| abstract |
(57) [Summary] [PROBLEMS] To propose a heater structure that is resistant to thermal shock during heating and cooling and has excellent temperature uniformity on a heated surface. A ceramic plate-shaped heater having a heating element provided on one surface of or inside a substrate, wherein the substrate is composed of a plurality of plate-shaped segments, and is independent for each segment. Either the heating element pattern was formed, or the segments were rod-shaped, and the rod-shaped segments were arranged in a row so as to present a heating surface or a flat surface to form a lump. |