| abstract |
(57) Abstract: In a gas supply member manufactured by a multilayer sintering method of ceramic green sheets, turbulence is caused in a gas supplied through the gas supply member. A ceramic gas supply member (20A) is composed of a laminate of a plurality of ceramic plates, and includes a first ceramic layer (7A) and a second ceramic layer (8A) that are laminated. First space 1 in which ceramic layer 7A is separated into a plurality of first spaces 1 The first partition walls 7a and 7b that form 0A are provided. The ceramic layer 8A includes second partitions 8a and 8b forming a plurality of separated second spaces 9A. The adjacent first space 10A communicates via the same second space 9A, and the plurality of first space 10A and second space 9A communicate with each other to form a gas flow path. |