http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002173669-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbdfa36b677f4ef61245ca725011e221 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2000-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_924941af4e01e7b113913df5d02f9b05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_219c91705611912c7500a396b3144a81 |
| publicationDate | 2002-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002173669-A |
| titleOfInvention | Slurry for polishing metal film on semiconductor substrate |
| abstract | (57) Abstract: In a process of flattening a metal film on a semiconductor substrate, the metal film is polished at high speed even under a low load condition, and defects such as scratch, dishing, and erosion are generated on a surface to be polished. Provided is a metal film polishing slurry that can be suppressed. SOLUTION: Colloidal titanium oxide and iron (I) II) A slurry for polishing a metal film, comprising a compound as an essential component. The interaction between the colloidal titanium oxide and the iron (III) ion generated from the iron (III) compound lowers the etchability of the slurry itself and suppresses the occurrence of defects such as dishing and erosion. Further, since it has excellent polishing performance such as high-speed polishing and low scratching even under low load conditions, application to a mass production process or a process using a porous low dielectric constant insulating film can be expected. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015502417-A |
| priorityDate | 2000-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.