| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 |
| filingDate |
2000-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab74503e71436df693a9168b5259e72c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b350e9372351829687b53625b4c546e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f1d890b9d2ab3727d4f42ef7731e82c |
| publicationDate |
2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002170783-A |
| titleOfInvention |
Plasma doping method and apparatus |
| abstract |
PROBLEM TO BE SOLVED: To provide low-cost and uniform plasma doping in a plasma doping apparatus using a helicon wave plasma source. SOLUTION: A potential is applied to a processing table 4 on which a sample 5 to be processed is mounted without using a magnetic field generated by a magnet used in combination with a coil of a helicon wave plasma source to generate a bias between the plasma and the surface of the sample 5. The plasma doping is effectively performed by controlling the plasma near the surface of the sample 5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100364054-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5461404-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005005328-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010018797-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8709926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863168-B2 |
| priorityDate |
2000-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |