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publicationDate 2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002170782-A
titleOfInvention Plasma doping method and plasma doping apparatus
abstract (57) [Problem] To efficiently realize plasma doping at a high degree of vacuum by generating plasma having a high density. SOLUTION: In a plasma doping method in which a substance is introduced near the surface of an object to be processed using plasma, helicon wave plasma is used as a plasma source.
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Total number of triples: 38.