http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002168761-A

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publicationDate 2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002168761-A
titleOfInvention How to make an optical aperture
abstract (57) [Problem] An object of the present invention is to provide a method for forming minute openings having a uniform opening diameter with good mass productivity. SOLUTION: In forming an optical opening for irradiating and detecting near-field light existing near the tip of a cone-shaped chip covered with a light-shielding film, the stopper comes into contact with a stopper having substantially the same height as the chip. At least a part of the contacting body is displaced by an external force, and an opening is formed by bringing at least a part of the displaced contacting body into contact with a light shielding film near the tip of the chip. Method of making a simple opening.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4564038-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008089587-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4620166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008015865-A1
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Total number of triples: 34.