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publicationDate 2002-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002168758-A
titleOfInvention Method for producing conical projection having optical aperture
abstract (57) [Problem] An object of the present invention is to provide a method for forming a minute opening having a uniform opening diameter by a simple method. SOLUTION: A step of covering the entirety of the dielectric projection 1 with a light shielding film 3, a step of forming a projection 2 near the dielectric projection 1 having substantially the same height as the dielectric projection, and a pressing step having a substantially flat surface. A step of forming an optical opening at the tip of the dielectric projection 1 by simultaneously applying an impact to the dielectric projection 1 and the projection 2 by using the dust body 6 to form a conical projection having an optical opening; Make it.
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Total number of triples: 27.