http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002167667-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C19-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 |
filingDate | 2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59edef447ef1fad632ca6672826428b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acc29b5cd35f30c544dc9f1e86ae81e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42ac3f27da92eb66759a34519c8bef12 |
publicationDate | 2002-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2002167667-A |
titleOfInvention | Sputtering target for forming light-shielding film for black matrix and light-shielding film formed using the sputtering target |
abstract | (57) Abstract: Provided is a sputtering target for forming a black matrix light-shielding film to be laminated in a step of manufacturing a color panel such as a liquid crystal display, and a light-shielding film formed using the sputtering target. (A) Mo: 10 to 30% and Nb: 4 A Ni-based alloy having a composition comprising about 20% in combination and the balance consisting of Ni and unavoidable impurities; A Ni-based alloy having a composition in which one or two of Ti: 1 to 5% and Fe: 1 to 5% are further added to the base alloy; (C) The Ni-based alloy according to (a) or (b), Further, one or two of Cu and V are combined with 1 to 2 in total. A sputtering target made of a Ni-based alloy having a composition with a composite addition of 10%, and a light-shielding film formed using these sputtering targets. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010132974-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007031832-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014208887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006162942-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106062241-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101848-A |
priorityDate | 2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.