http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002162743-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f548ca15b9b5748f1afd80e3d1636ec |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10 |
| filingDate | 2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d4b68e3b5035451d5508323b130bc9f |
| publicationDate | 2002-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002162743-A |
| titleOfInvention | Photosensitive resin composition and method for producing the same |
| abstract | PROBLEM TO BE SOLVED: To provide a polyimide precursor which can be developed with an aqueous alkali solution and has a sharp negative pattern forming ability. (A) A phenolic O in an ester structure A polyimide precursor having an H group, (B) a compound containing an acetoxymethyl group-substituted aromatic ring structure such as di (acetoxymethyl) benzene, and the (A) polyimide precursor is insolubilized in an aqueous alkaline solution. A photosensitive resin composition comprising an insolubilizing agent, (C) a photoacid generator that generates an acidic functional group by actinic rays, and (D) a solvent, and a polyimide precursor containing a photoacid generator and an insolubilizing agent. A method for producing a photosensitive resin composition, comprising a step of preparing a resin solvent to be added. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016124493-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011104127-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10197915-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016084694-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107001629-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994538-B2 |
| priorityDate | 2000-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 208.