http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002156537-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12 |
| filingDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95ddeefa81e2b28664a0bc1b70170e70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_861ddf6df0b1bb7197fa564db2f38d8b |
| publicationDate | 2002-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002156537-A |
| titleOfInvention | Optical waveguide |
| abstract | (57) [Problem] To provide an optical waveguide having a good heater. In the present optical waveguide, since a thin film heater 2 and an electrode 4 are capacitively coupled, even if they do not directly contact, if an alternating current is applied to the electrode 4 via a wire wiring 5, the thin film heater 2 and the electrode 4 can be thinned. Electric power can be supplied to the heater 2 to heat it. Therefore, even when Ti or its silicide is used as the refractory metal (thin film heater 2) and Cr (a part of the electrode 4) is used as the adhesion improving film, direct contact between these dissimilar metals can be suppressed. Therefore, in particular, it is possible to suppress the deterioration of the thin film heater characteristics due to the alloying of Ta and Cr, and to provide a good optical waveguide. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012042648-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111562687-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111562687-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011507002-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015179211-A |
| priorityDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.