http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002148778-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13aa7b32ae00ed83af7dfaa0b6a1f7c2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B27-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03D13-00 |
| filingDate | 2000-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d4a7cd7d8f61f545b5b2f441388249e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cdf85f70812bc5cec974c3d3a3a702e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e48efaee1d78ee7f1ef3c419bc0102e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92ff9acc5d7d4e7c875a34024ff9bca9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c0d5779b4da188fc36ee8e8bda6cc9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf660fe24c23bd28aa97502d80fdc9df |
| publicationDate | 2002-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002148778-A |
| titleOfInvention | Laser beam exposure equipment |
| abstract | (57) [Problem] To provide a laser beam exposure apparatus which has a simple configuration and can suppress image unevenness due to an interference phenomenon. A laser beam emitted from a laser light source is linearly polarized by a beam splitter in a beam splitter. L2, the laser beam L2 is reflected by the mirror 3 and is made parallel to the laser beam L1. , And is converted into a circularly polarized state. Further, only the laser beam L1 passes through the λ / 2 wave plate 5 and is rotated in the reverse direction. Then, the laser beam L1 is condensed by the optical system 6 and scanned by a polygon mirror (not shown). Meanwhile, the same point on the film F as the recording medium is irradiated at a predetermined angle via the fθ optical system 7, and with this configuration, Even for the film F having birefringence, image unevenness due to the interference phenomenon can be effectively suppressed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100828365-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020178847-A1 |
| priorityDate | 2000-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.