abstract |
(57) [Problem] To provide a method for regenerating a container for firing a SiC substrate. An object to be fired of a ceramic component is placed and used, and Al 2 O 3 , mullite, Zr In a method for regenerating a firing container in which a ceramic coating mainly containing at least one or more of O 2 and spinel is formed, after using the firing container several times, the SiC A method for regenerating a firing container in which a ceramic coating is plasma-sprayed on a surface of a porous substrate to a thickness of 30 to 500 μm and regenerated. |