http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002107378-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59af9f163860351d1ca549dbf004f54b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_491291cd70b598a17223f1e2801ab080 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4587193c120090646c2b6dc50ee7cf00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fc22460b454d59e98fda08955c82c48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_def155bbc08baf703d6c86fe7b53bba6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a58f0fcf3944c725afa7a8b940f19d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e236c23d83ba5709c301dc272d8bd750 |
| publicationDate | 2002-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002107378-A |
| titleOfInvention | Substrate for semiconductor inspection |
| abstract | (57) [Problem] To provide a semiconductor inspection substrate capable of performing a wide range of inspections from low-speed operation to high-speed operation and having a long life. SOLUTION: A plurality of probes 2 are provided on a silicon substrate 1a. A semiconductor inspection substrate for arranging an external connection electrode 5 for connecting an external inspection device, and contacting a plurality of electrode pads of the semiconductor element with the probe 2 to inspect electrical characteristics of the semiconductor element; Wiring 4 connecting between probe 2 and external connection electrode 5 is formed of at least three metal films on insulating film 1b formed on substrate 1a, and is formed of at least three metal films. Wiring structure, It can support a wide range of inspections from low-speed operation to high-speed operation, and is hard to break even when used repeatedly. A semiconductor inspection substrate having a long life can be provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018073924-A |
| priorityDate | 2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.