| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate |
2000-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c071f66f7ef6e4b973b97b23947f201 |
| publicationDate |
2002-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002107254-A |
| titleOfInvention |
Package for pressure detector |
| abstract |
(57) [Problem] To provide a pressure detection device which is small, has high sensitivity, and can accurately detect external pressure. SOLUTION: A first metallized electrode 7 for forming a capacitance is provided on the other main surface of an insulating base 1 on which a semiconductor element 3 is mounted on one main surface, and a static electrode facing the first metallized electrode 7 is provided. A pressure detecting device in which an insulating plate 2 having a second metallized electrode 9 for forming a capacitance on its inner main surface is brazed to the insulating base 1 in a flexible state so as to form a closed space between the insulating plate 1 and the insulating base 1. Package for insulating plate 2 Has a flat inner surface and a thicker outer peripheral portion than a central portion. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010113803-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005108946-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5217163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010236942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005241300-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I427278-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8656787-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012063363-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005037383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101257608-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102369424-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010210509-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010236949-A |
| priorityDate |
2000-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |