http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002093945-A

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publicationDate 2002-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002093945-A
titleOfInvention Semiconductor device and method of manufacturing semiconductor device
abstract [PROBLEMS] To provide a semiconductor device and a method of manufacturing the same capable of reducing the warpage of a wafer and improving the yield in a wafer-level CSP structure. SOLUTION: By forming an insulating film 4, a sealing film 7 or an interlayer insulating film 10 from a resin having an elastic modulus of 20 to 200 kg / mm 2, the warpage of a wafer, which has conventionally been a problem, is greatly reduced. Improve manufacturing yield. A resin formed by curing a liquid bismaleimide resin is used as a resin for realizing the low elastic modulus. The resin thus formed has low elastic modulus, high heat resistance and superhydrophobic properties, so that the reliability can be greatly improved.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006035860-A1
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Total number of triples: 48.