| abstract |
(57) [Problem] To stabilize the device characteristics of a flat-type electron-emitting device and improve the electron-emitting efficiency. SOLUTION: A pair of electrodes 11 and 12 are formed on the same plane of an insulating substrate 10, conductive thin films 13 and 14 are formed so as to straddle these electrodes, and electron emission is performed on the thin films 13 and 14. In the flat-type electron-emitting device in which the portions 17 are formed, the electron-emitting portions 17 are formed by deposits 15 and 1 containing boron and carbon. 6, and the sediments 15, 16 are made of alkylborane, The deposition was performed by passing a current between the electrodes 11 and 12 in an atmosphere containing any of aryl borane, vinyl borane, and allyl borane. |