http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002090329-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c461ae4bb31cb19f245889277cb753f0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 |
| filingDate | 2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69136f6f2261a498fef413c964a890ad |
| publicationDate | 2002-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002090329-A |
| titleOfInvention | Humidity sensor and its manufacturing method |
| abstract | (57) [Problem] To provide a humidity sensor having a wide measurement range and good environmental stress including dew condensation resistance and a method of manufacturing the same. A lower electrode film is formed on a substrate, a ferroelectric moisture-sensitive film is formed on the lower electrode film, and an upper electrode film is formed on the moisture-sensitive film. This is a humidity sensor S formed as follows. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016024500-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7114848-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104165904-A |
| priorityDate | 2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.