| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4903b7b4b84e3b845aef791cad8f2e97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-77 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22 |
| filingDate |
2000-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d94938dbcb45360f7aa6bc19a08bb500
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6151ea608e58292fea8c5499dc1d92aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ed32fd9f5d7ac65992daac880b70732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92e790fdcbeb20ab0d3c6c7ace4a7a69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e9070cbd36a9f3143751f6606a40bfb |
| publicationDate |
2002-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002087846-A |
| titleOfInvention |
Method for manufacturing glass plate with thin film and glass plate |
| abstract |
PROBLEM TO BE SOLVED: To efficiently produce a glass plate with a thin film having irregularities on the surface by generating fine particles by a reaction accompanying a CVD method and mixing the fine particles in a film. SOLUTION: As a first method, a film-forming gas containing a chlorine-containing compound is supplied onto a glass 1 containing an alkali component to form a film 2 (tin oxide film) while a chloride containing the alkali component is formed. Fine particles 5 (sodium chloride) are generated and mixed into the film to form irregularities. As a second method, a film-forming gas containing a silicon-containing inorganic compound (monosilane) and an organic gas (ethylene) is supplied to form a film (silicon oxide film) while generating silicon oxide fine particles and mixing into the film. I do. If a crystalline film is further formed by using these fine particles as crystal growth nuclei, a dome-shaped convex portion can be formed by abnormal growth of crystal grains. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7320827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03080530-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104250726-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03064345-A1 |
| priorityDate |
2000-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |