http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002083561-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2000-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8986c129d1a0b82fadf3f068532fc21d |
| publicationDate | 2002-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002083561-A |
| titleOfInvention | Electron gun and electron optical column |
| abstract | (57) [Problem] To provide an electron gun and an electron optical column which can reduce an increase in the temperature of an electrode, hardly cause contamination, and hardly cause dielectric breakdown or the like. A high-voltage insulator (27) is fixed to an electron gun chamber (24) of an electron gun (1). The high-pressure insulator 27 is made of high thermal conductive Si C or AlN. A Wehnelt electrode 22 and a control anode electrode 23 are attached to the lower surface of the high-voltage insulator 27. The cathode 21 is fixed to the lower end of the Wehnelt electrode 22 via a quartz spacer 25. Since the quartz spacer 25 increases the thermal resistance between the cathode 21 and the Wehnelt electrode 22, the cathode 21 The heat loss escaping from the outside is reduced. Furthermore, since the heat conduction of the high-voltage insulator 27 is good, the thermal resistance between the Wehnelt electrode 22 and the electron gun chamber 24 is small, and the temperature rise of the Wehnelt electrode 22 is suppressed, so that the thermal expansion, the amount of released gas, and the insulation are increased. Destruction is unlikely to occur. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I510863-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008059759-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012518897-A |
| priorityDate | 2000-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.