| abstract |
(57) [Problem] To provide a recycling apparatus capable of extracting rare elements from industrial waste containing harmful substances generated in a semiconductor product manufacturing process and reusing the same. SOLUTION: A recycling apparatus 1000 introduces a heating chamber 40, a crucible 50 provided in the heating chamber, for storing industrial waste and heating it to a predetermined temperature, and a gas evaporated from the crucible 50, Recovery chambers 200 and 300 having gas exhaust paths maintained at a low temperature, and a turbomolecular pump 2 for selectively reducing the pressure in the heating chamber 40 and one of the recovery chambers 200 or 300 0. |