http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002076074-A

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Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44ff3005508304394801e265e503b811
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
filingDate 2000-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35f1c40ad505e5fe027dac9790bac674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e80d566830541f2208873428e167e497
publicationDate 2002-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002076074-A
titleOfInvention Contact component for wafer batch contact board and method of manufacturing the same
abstract (57) [Summary] (with correction) [PROBLEMS] To provide a contact component for a wafer batch contact board, which further improves the positional accuracy of an isolated pad and an isolated bump, and a method of manufacturing the same. SOLUTION: In order to reduce the elongation of the contact portion of the insulating film 32 due to the ring 31 at the contact portion in the wafer batch contact board used for collectively testing a large number of semiconductor devices formed on the wafer, the insulating film 32 is provided. Avoid the isolated pad 34 and / or the isolated bump on the front and / or back surface of the The remaining pattern 35 is formed so as to be less than m%.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115066109-B
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007250898-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7876088-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012015779-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006051878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014122872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006051880-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005103730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005103735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005103731-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009107747-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115066109-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7671609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005103732-A1
priorityDate 2000-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000039452-A
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Total number of triples: 33.