http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002075691-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_adc007c8c01274063b3684754f1d1c0e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-066 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-32 |
| filingDate | 2001-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce023a71feaf964a020a0638a217a22e |
| publicationDate | 2002-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002075691-A |
| titleOfInvention | Plasma generator |
| abstract | PROBLEM TO BE SOLVED: To reduce the electric power of an entire plasma generator, reduce the amount of material sputtered from a cathode by ion bombardment, thereby reducing discharge contamination, and reduce cathode life and plasma discharge. Improve stability and. The cathode comprises an anode (2) and a cathode (1), the cathode being made of or containing a wide bandgap material, the anode being a tube, axially spaced from the cathode, and an insulating sheath. 5 surrounds the cathode. |
| priorityDate | 2000-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.