| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2000-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fea1b5c8d98003eaa42c20cd3e9b6a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf75b49665671610e39861c368f5a368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a9a0b5935b7ab769a7d7589ebf14f5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c8260de60396162a77c33858a92f27d |
| publicationDate |
2002-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002069635-A |
| titleOfInvention |
Plasma generating apparatus, dense hard thin film forming apparatus using the same, and hard thin film forming method |
| abstract |
(57) [Problem] To prevent a reduction in RF power absorption efficiency, SP3 Provided is a method and an apparatus capable of forming a dense and hard film such as a BN film containing a large number of structures. A plasma generating chamber is provided adjacent to a film forming chamber in which a substrate can be placed in a high vacuum state, and a high frequency antenna for plasma generation and a dense hard thin film are formed inside the plasma generating chamber. A target of a material is arranged, a high-density plasma is generated, and atoms of the target material sputtered from the target are introduced into the substrate in an ionized state. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6658895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016047184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106715750-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013030954-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011179061-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106715750-A |
| priorityDate |
2000-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |