http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002064352-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1476752f2420c8f8eb53464cf7fc922b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-08 |
| filingDate | 2000-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb5dc5532b5733a5b6e1e5779deea31 |
| publicationDate | 2002-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002064352-A |
| titleOfInvention | Method for manufacturing piezoelectric element |
| abstract | [PROBLEMS] To efficiently and inexpensively produce a stable piezoelectric element which does not require the formation of a protective film prior to dicing, does not easily cause electrode corrosion during dicing, has good electric characteristics and is stable. And a method of manufacturing the same. SOLUTION: When dicing a wafer 1 in which an electrode 3 made of an Al alloy is formed on a piezoelectric substrate 2 made of a piezoelectric material and formed using a halogen element-containing gas, while cooling the wafer 1 with cooling water. And a method of manufacturing a piezoelectric element, wherein cooling water containing a compound which reacts with Al to form an anticorrosion film on an electrode surface made of an Al alloy is used as cooling water. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012124398-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02056465-A1 |
| priorityDate | 2000-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.