http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002062335-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2000-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a58f0fcf3944c725afa7a8b940f19d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aad1291a19e54cd71e562bab906b409f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c76d480a5c0c99f0dc57bcf7866b9f55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59af9f163860351d1ca549dbf004f54b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9aa5813db9f94043591e7270813fcaa3 |
| publicationDate | 2002-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002062335-A |
| titleOfInvention | Semiconductor device inspection substrate and semiconductor device manufacturing method |
| abstract | An object of the present invention is to provide a semiconductor device manufacturing process in which electrical characteristics are inspected at a high operating frequency to suppress noise generation and stabilize. It is an object of the present invention to provide an inexpensive semiconductor device inspection substrate capable of performing highly reliable inspection. A method of inspecting a semiconductor device by directly contacting a plurality of electrode pads of a semiconductor device to be inspected with a plurality of probes formed on a probe structure, and electrically connecting the plurality of probes to the semiconductor device. An electrical characteristic test is performed using a semiconductor device test substrate in which a pass capacitor is formed on the probe structure. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015169645-A |
| priorityDate | 2000-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 19.