http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002048841-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_216a7faed04ec9497c9819cc03c04599 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate | 2001-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a3e0b5f4bd8569a220903fb69cb9328 |
| publicationDate | 2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2002048841-A |
| titleOfInvention | Microprobe support component, microprobe device, optical component, electronic control component, patterning mask, and method of manufacturing them |
| abstract | (57) Abstract: An object of the present invention is to provide a microprobe device for inspecting an IC in which a large number of IC terminals are formed at a very narrow interval (narrow pitch). An object of the present invention is to provide a microprobe device having microprobes arranged at a very narrow pitch and a microprobe support component configured in the device. SOLUTION: A step of etching a crystal lattice <110> plane of a Si substrate to form through grooves at predetermined widths and intervals; The microprobe is supported by inserting the microprobe into a hole formed by a step of superposing a plurality of silicon (Si) substrates having the through-grooves such that the through-grooves are arranged in a lattice. It is characterized by having. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009025164-A |
| priorityDate | 2000-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.