http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002029743-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G9-02
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filingDate 2000-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab2d7d252036f445ea625eb06420a9c3
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publicationDate 2002-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002029743-A
titleOfInvention Manufacturing method of inorganic film
abstract PROBLEM TO BE SOLVED: To provide a method for producing an inorganic film, which is simple and can produce an inorganic film such as a 1-10 μm thick film or a ceramic thin layer without cracks in a series of processes. I do. SOLUTION: A catalyst solution and a raw material solution are respectively placed in a lower part and an upper part of a container 12 of an inorganic film production apparatus 10, whereby a film is formed (deposited) on a two-liquid interface between the raw material solution and the catalyst solution. The cock 18 is opened, the catalyst solution is removed from the discharge pipe 16, the film is placed on the substrate, the film is taken out together with the substrate, and the film is naturally dried to obtain an inorganic film.
priorityDate 2000-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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